Product & Service
VSS
VSS is out of production, click me to go to the upgrade version VSSⅡ.
Measuring the robot vibration in carrying/ transporting wafer or mask
The robot is used extensively in semiconductor factories for carrying/ transporting wafer or mask. Abnormal vibration/ jiggle will be occurred after robot working in a period of time due to loose belt, abrasion, and backlash.
It is important to measure and check if the robot in good condition, when it should be maintained and if it is qualified after maintains.
Wireless Vibration Sensing System, developed by ChiefSI, can measure vibration of the robot in carrying/ transporting wafer or mask. It is provided with in wafer or mask shape, high precision 3-axis vibration sensor. It records all test data in high speed and also transports real-time data by WiFi or save in SD card for 4 hours continuously. Applying to test after maintains of AGV, Wafer storage system, and robot.
Feature：
- Transports real-time data by WiFi or save in SD card for 4 hours continuously.
- Simple presentation, also can be customized.
- 3-axis vibration sensor build-in, acceleration and angular speed can be measured.
- Providing application software for data acquisition and spectrum process.
Model：
| Model | VSS-8 | VSS-12 | VSS-Mask | VSS-Cub |
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| Size(mm) | Φ203(8")x6.7(T) | Φ305(12")x7.0(T) | 152(W)x152(D)x6.5(H) | 82(W)x77(D)x31(H) |
| weight(g) | 180 | 260 | 320 | 250 |
| Available time(hr) | 4hrs | 4hrs | 4hrs | 4hrs* |
* In order to log data for a long time, an optional power module is available for VSS-Cub.
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Measured type |
acceleration and angular speed |
Mode |
Continuous, Trigger |
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Sampling rate(S/s) |
10、20、50、100、200、500、1000 |
Data storage |
SD Card, Computer(by WiFi) |
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Processing function |
YT, Spectrum, Statistics, angle analysis, sum vector, vibration displacement, event detection |
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Range |
Acceleration(g) |
±2, ±4, ±8, ±16 |
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angular speed(°/sec) |
±250, ±500, ±1000, ±2000 |
Filter Function |
Low pass、High Pass、Band pass、Band stop |
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Pitch(°) |
±80° |
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Roll(°) |
±80° |
Spectrum analysis |
FFT、Power Spectrum、Power Spectrum density |
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resolution |
Acceleration(bit) |
16(0.07mg@ range 2g) |
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angular speed(bit) |
16(0.008°/sec@ range 250°/sec) |
Statistics |
Max、Min、RMS、Mean、P-P |
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Interface |
WiFi |
FFT Average |
Vector、RMS、Peak hold、None |
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Storage |
SD Card(Max. 16G)* |
Data replay |
Forward, backward, play |
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Power |
Battery built-in |
Data output |
CSV/Excel Format |
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Available time |
>4hrs |
Language |
English |
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*The logging file is around 45MB for 1000Hz sampling rate in 1 hour.
Software：
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If you are interesting this products, please download the catalog now. A sales representative will contact with you as soon as possible
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