Product & Service
VSSⅡ
VSSⅡ(wireless vibration sensor)
VSSⅡ can measure three-axis acceleration, leveling angle, temperature and humidity. It’s only 4mm thick and very light. 8" and 12", two sizes are available.
In fab, any impact, friction, or shake will cause wafer damage even particle pollution. You worry about equipment operation not smoothly. You are not sure if equipment is due for maintenance. You need to evaluate the repaired equipment meets the original accuracy.
Let VSSⅡ help you if you have the above issues. It can measure the robot/ FOUP/ stocker/ OHT… vibration when transporting wafers, and can completely record the vibration during operation process with high sampling rate.
VSSⅡ can be used to check if the equipment operating smoothly or when the equipment needs to be maintained? Furthermore, VSSⅡ use to evaluate vibration of the equipment before and after repair.
To ensure smooth operation of your equipment, avoid process problems and wafer damage, let VSSⅡ help you from now on.
Feature：
- Wireless measurement, continuous recording up to 4 hours.
- Built-in sensor, it can measure three-axis acceleration, leveling angle, temperature and humidity.
- Software for spectrum analysis, angle analysis, trend analysis.
- Application: AGV (Automated Guided Vehicle), FOUP, OHT, Wafer stocker, Wafer robot
Software：
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| Real-Time Waveform | Angle |
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| FFT | Report-Raw data |
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Measured type |
Three-axis acceleration, Leveling angle, Humidity, Temperature(1) |
Size |
Diameter 300mm Thickness 4mm (±0.2mm) |
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Sampling rate (S/s) |
125, 250, 500, 1000 |
Weight |
242g |
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Range |
Acceleration (g) |
±2, ±4, ±8 |
Processing function |
YT, Spectrum, Statistics, Angle analysis, Sum vector, Vibration displacement, Event detection |
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Pitch(°) |
±45° |
Mode |
Continuous |
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Roll(°) |
±45° |
Data storage |
Computer(by Bluetooth) |
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Resolution |
Acceleration (20-bit) |
4μg @ 2g range 8μg @ 4g range 16μg @ 8g range |
Filter function |
Low pass, High pass, Band pass, Band stop |
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Pitch(°) |
0.005° |
Spectrum analysis |
FFT, Power Spectrum, Power Spectrum density |
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Roll (°) |
0.005° |
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Temperature |
0°C~60°C (±0.3°C) |
Statistics |
Max, Min, RMS, Mean, P-P |
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Humidity |
0%~100% RH (±2%@20%~80%) |
FFT Average |
RMS, Peak hold, None |
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Interface |
Bluetooth |
Data replay |
Forward, backward, play |
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Power |
Battery built-in |
Data output |
CSV / Excel Format |
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Available time |
>4hrs |
Language |
English |
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(1)：Sampling rate of temperature and humidity:1 S/s
If you are interesting this products, please download the catalog now. A sales representative will contact with you as soon as possible
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