快速而直覺化的—四點探針薄膜電阻量測系統(Four-Point Probe Sheet Resistance Measurement)
運用四點探針量測原理,量測各式片狀或塊狀之導體、半導體材料以及導電薄膜的薄膜電阻(Sheet Resistance,又稱薄層電阻、片電阻)。搭配高精度的四點探針台以及快速準確的SMU(Source Measure Unit),可輕易測得材料的薄膜阻抗,並廣泛應用於半導體、太陽能、OLED、微機電、燃料電池等各產業上。
四點探針量測系統特色:
Chuck size | 6”,8”,12” | Measure item | Sheet Resistance, Bulk Resistivity, Conductivity |
Sample geometry | Circle or Square | Interface | RS-232 or GPIB |
Head Up/Down | 16mm | Language | English |
Correct factor | Thickness & Geometry | PC Requirements | CPU:P4,HD:1GB,USB2.0 |
Probe Pin Material | BeCu(or Tungsten Carbide) | Monitor Requirements | 1280*800 resolution |
Probe Pin Spacing | 40mil,50mil,62.5mil | O.S. Supported | Windows XP, Windows 7, Windows10 |
Probe Pin Spring | 45grams,85grams,180grams | SMU Support | Keithley 2400/2401 |
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